The advent of 3D Heterogeneous Integration (3DHI) in advanced packaging and wafer-level IC packaging introduces significant challenges for inline defect inspection and offline failure analysis. The 3D stacking and wafer bonding processes create optically opaque structures, necessitating techniques like x-rays to penetrate multiple buried layers for defect detection.
IEEE-Affiliated Group Name: EPS
URL: https://resourcecenter.eps.ieee.org/education/webinars/epsvid1170